Post-deposition annealing effects on microstructure, mechanical and tribological properties of AlCrN films
The post-deposition annealing of AlCrN films was conducted in an atmospheric environment for 2 h, with annealing temperatures ranging from 25 to 1000 °C. The microstructure, mechanical, and tribological properties were systematically investigated as a function of the annealing temperature. The resul...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-07-01
|
| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785423016630 |