An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring
In this study, we designed a microelectromechanical system (MEMS) Pirani vacuum sensor with a compact size. Specifically, the sensor was successfully fabricated based on the Pirani principle and using a commercial eight-inch MEMS foundry process. The sensor fabrication process was carried out using...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/10/1686 |