Tungsten–SiO<sub>2</sub>–Based Planar Field Emission Microtriodes with Different Electrode Topologies
This study examines the electrical properties and layer quality of field emission microtriodes that have planar electrode geometry and are based on tungsten (W) and silicon dioxide (SiO<sub>2</sub>). Two types of microtriodes were analyzed: one with a multi-tip cathode fabricated using p...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-08-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/16/17/5781 |