Investigation of SiC and C Nanostructures Obtained by MWCVD

Investigation of SiC and C Nanostructures Obtained by MWCVD

The results of experiments on the synthesis of SiC and C nanostructures by chemical vapor deposition in microwave plasma are presented in this article. The single crystal silicon plates with orientations [100] and [111] which previously passed chemical purification were used as substrates. Also, the...

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Bibliographic Details
Main Authors: B. Z. Mansurov, A. K. Kenzhegulov, B. S. Medyanova, G. Partizan, G. S. Suyundykova, B. Zhumadilov, M.E. Mansurova, U. P. Koztayeva, B. A. Aliyev
Format: Article
Language:English
Published: al-Farabi Kazakh National University 2017-06-01
Series:Eurasian Chemico-Technological Journal
Subjects:
silicon carbide and carbon
nanostructures
chemical deposition from the gas phase
microwave plasma
porous silicon
method of scanning electron microscopy
Raman scattering
Online Access:http://ect-journal.kz/index.php/ectj/article/view/105

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http://ect-journal.kz/index.php/ectj/article/view/105

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