Dynamic thermal model and control performance analysis over frequency domain of temperature control unit
The temperature control unit (TCU) is widely used in lithography tools or other precision equipment to achieve a high level of temperature stability. Still, there is no systematic analysis of the thermal model in the present study about how to build a precise TCU. In this paper, we provide a new per...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-05-01
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| Series: | Case Studies in Thermal Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214157X23002812 |