Dynamic thermal model and control performance analysis over frequency domain of temperature control unit
The temperature control unit (TCU) is widely used in lithography tools or other precision equipment to achieve a high level of temperature stability. Still, there is no systematic analysis of the thermal model in the present study about how to build a precise TCU. In this paper, we provide a new per...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-05-01
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| Series: | Case Studies in Thermal Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214157X23002812 |
| _version_ | 1797832703456837632 |
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| author | Zhibo Zeng Wei Zhang Hangcheng Yu Di Cao Xiaoping Li |
| author_facet | Zhibo Zeng Wei Zhang Hangcheng Yu Di Cao Xiaoping Li |
| author_sort | Zhibo Zeng |
| collection | DOAJ |
| description | The temperature control unit (TCU) is widely used in lithography tools or other precision equipment to achieve a high level of temperature stability. Still, there is no systematic analysis of the thermal model in the present study about how to build a precise TCU. In this paper, we provide a new perspective for analyzing the outlet temperature performance of TCU. We analyzed the thermal model of TCU’s sub-devices and thermal model of environmental disturbance over the frequency domain, then obtained the influence of different processes on the TCU output temperature at different frequencies. The above thermal models are brought into two commonly used process control frameworks to comprehensively consider the temperature control effect under the combination of control and hardware. The relationship expressions from the temperature spectrum performance to the fluctuation index are derived to obtain the quantitative TCU temperature performance. We built a TCU experimental platform with the water medium and verified the accuracy of TCU thermal models, thermal disturbance models, and the accuracy of temperature fluctuation index derivation, all within a 5% error. The TCU temperature accuracy reaches ± 1mk under one sigma statistics as a thermal engineering application case. |
| first_indexed | 2024-04-09T14:13:13Z |
| format | Article |
| id | doaj.art-8314471eff714562970e56725d9b4fa8 |
| institution | Directory Open Access Journal |
| issn | 2214-157X |
| language | English |
| last_indexed | 2024-04-09T14:13:13Z |
| publishDate | 2023-05-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Case Studies in Thermal Engineering |
| spelling | doaj.art-8314471eff714562970e56725d9b4fa82023-05-06T04:38:06ZengElsevierCase Studies in Thermal Engineering2214-157X2023-05-0145102975Dynamic thermal model and control performance analysis over frequency domain of temperature control unitZhibo Zeng0Wei Zhang1Hangcheng Yu2Di Cao3Xiaoping Li4State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, ChinaState Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, ChinaState Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, ChinaState Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, ChinaCorresponding author.; State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, ChinaThe temperature control unit (TCU) is widely used in lithography tools or other precision equipment to achieve a high level of temperature stability. Still, there is no systematic analysis of the thermal model in the present study about how to build a precise TCU. In this paper, we provide a new perspective for analyzing the outlet temperature performance of TCU. We analyzed the thermal model of TCU’s sub-devices and thermal model of environmental disturbance over the frequency domain, then obtained the influence of different processes on the TCU output temperature at different frequencies. The above thermal models are brought into two commonly used process control frameworks to comprehensively consider the temperature control effect under the combination of control and hardware. The relationship expressions from the temperature spectrum performance to the fluctuation index are derived to obtain the quantitative TCU temperature performance. We built a TCU experimental platform with the water medium and verified the accuracy of TCU thermal models, thermal disturbance models, and the accuracy of temperature fluctuation index derivation, all within a 5% error. The TCU temperature accuracy reaches ± 1mk under one sigma statistics as a thermal engineering application case.http://www.sciencedirect.com/science/article/pii/S2214157X23002812Temperature control unit (TCU)Thermal modelFrequency domainTemperature stability |
| spellingShingle | Zhibo Zeng Wei Zhang Hangcheng Yu Di Cao Xiaoping Li Dynamic thermal model and control performance analysis over frequency domain of temperature control unit Case Studies in Thermal Engineering Temperature control unit (TCU) Thermal model Frequency domain Temperature stability |
| title | Dynamic thermal model and control performance analysis over frequency domain of temperature control unit |
| title_full | Dynamic thermal model and control performance analysis over frequency domain of temperature control unit |
| title_fullStr | Dynamic thermal model and control performance analysis over frequency domain of temperature control unit |
| title_full_unstemmed | Dynamic thermal model and control performance analysis over frequency domain of temperature control unit |
| title_short | Dynamic thermal model and control performance analysis over frequency domain of temperature control unit |
| title_sort | dynamic thermal model and control performance analysis over frequency domain of temperature control unit |
| topic | Temperature control unit (TCU) Thermal model Frequency domain Temperature stability |
| url | http://www.sciencedirect.com/science/article/pii/S2214157X23002812 |
| work_keys_str_mv | AT zhibozeng dynamicthermalmodelandcontrolperformanceanalysisoverfrequencydomainoftemperaturecontrolunit AT weizhang dynamicthermalmodelandcontrolperformanceanalysisoverfrequencydomainoftemperaturecontrolunit AT hangchengyu dynamicthermalmodelandcontrolperformanceanalysisoverfrequencydomainoftemperaturecontrolunit AT dicao dynamicthermalmodelandcontrolperformanceanalysisoverfrequencydomainoftemperaturecontrolunit AT xiaopingli dynamicthermalmodelandcontrolperformanceanalysisoverfrequencydomainoftemperaturecontrolunit |