Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror
The Micro-Electro-Mechanical-System (MEMS) micromirror has shown great advantages in Light Detection and Ranging (LiDAR) for autonomous vehicles. The equipment on vehicles is usually exposed to environmental vibration that may degrade or even destroy the flexure of the micromirror for its delicate s...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/8/1490 |