Dynamical Sensitivity of Three-Layer Micro Electromechanical Systems to the Optical Properties of the Intervening Liquid Layer
Here, we investigate the actuation dynamics of a micro device with different intervening liquids between the actuating components under the influence of Casimir and dissipative hydrodynamic forces. This is enabled via phase space portraits, which demonstrate that by increasing the dielectric respons...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-11-01
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| Series: | Physics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2624-8174/5/4/70 |