Electrochemical Deposition of CoP and CoNiP as Hard Magnetic Scales in a Position Measurement System

The fabrication and design of hard magnetic materials for micro-electro-mechanical system applications by electrochemical deposition has to consider not only the intrinsic material properties but also the shape anisotropy of the micro-devices. Within the scope of the present work, an as-plated proce...

Full description

Bibliographic Details
Main Authors: Martin Theis, Tobias Bill, Heiko Knoll, Peter Starke, Monika Saumer
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Metals
Subjects:
Online Access:https://www.mdpi.com/2075-4701/12/2/235