Safe and Efficient Disposal of Hexachlorodisilane Liquid

This research project was to develop a safe and efficient method for disposal of HCDS liquid in large quantities. The proposed method is a two-stage process which includes direct hydrolysis of HCDS liquid in water, followed by alkaline cleavage of the hydrolyzed product in aqueous suspension by an a...

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Bibliographic Details
Main Authors: Thanh-Trung Nguyen, Yu-Wen Huang, Pei-Xuan Yan, Yu-Chun Hu, Hsiao-Yun Tsai, Jenq-Renn Chen, Eugene Y. Ngai
Format: Article
Language:English
Published: AIDIC Servizi S.r.l. 2022-05-01
Series:Chemical Engineering Transactions
Online Access:https://www.cetjournal.it/index.php/cet/article/view/12162