Procedure for Calibrating the Z-axis of a Confocal Microscope: Application for the Evaluation of Structured Surfaces

This work describes a method for the metrological characterization of structured surfaces using a confocal microscope. The proposed method is based on the calculation of texture parameters established in ISO 25178-2:2012. To ensure the traceability of these parameters, a procedure for the calibratio...

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Bibliographic Details
Main Authors: Chen Wang, Jesús Caja, Emilio Gómez, Piera Maresca
Format: Article
Language:English
Published: MDPI AG 2019-01-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/19/3/527