Procedure for Calibrating the Z-axis of a Confocal Microscope: Application for the Evaluation of Structured Surfaces
This work describes a method for the metrological characterization of structured surfaces using a confocal microscope. The proposed method is based on the calculation of texture parameters established in ISO 25178-2:2012. To ensure the traceability of these parameters, a procedure for the calibratio...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-01-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/19/3/527 |