MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control

MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control

In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that th...

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Bibliographic Details
Main Authors: Min Cui, Yong Huang, Wei Wang, Huiliang Cao
Format: Article
Language:English
Published: MDPI AG 2019-04-01
Series:Micromachines
Subjects:
dual-mass MEMS gyroscope
temperature compensation
scale factor
bias
drive mode
amplitude controlling
Online Access:https://www.mdpi.com/2072-666X/10/4/248

Internet

https://www.mdpi.com/2072-666X/10/4/248

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