A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure

A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure

This paper presents the development of a novel micro force sensor based on a laterally movable gate field-effect transistor (LMGFET). A precise electrical model is proposed for the performance evaluation of small-scale LMGFET devices and exhibits improved accuracy in comparison with previous models....

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Bibliographic Details
Main Authors: Wendi Gao, Zhixia Qiao, Xiangguang Han, Xiaozhang Wang, Adnan Shakoor, Cunlang Liu, Dejiang Lu, Ping Yang, Libo Zhao, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang, Dong Sun
Format: Article
Language:English
Published: Elsevier 2023-02-01
Series:Engineering
Subjects:
Force sensor
Laterally movable gate
Field-effect transistor
Photoresistive SU-8
Biomedical micromanipulation
Online Access:http://www.sciencedirect.com/science/article/pii/S2095809922005628

Internet

http://www.sciencedirect.com/science/article/pii/S2095809922005628

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