Electrical and Structural Properties of Semi-Polar-ZnO/<i>a</i>-Al<sub>2</sub>O<sub>3</sub> and Polar-ZnO/<i>c</i>-Al<sub>2</sub>O<sub>3</sub> Films: A Comparative Study

Electrical and Structural Properties of Semi-Polar-ZnO/<i>a</i>-Al<sub>2</sub>O<sub>3</sub> and Polar-ZnO/<i>c</i>-Al<sub>2</sub>O<sub>3</sub> Films: A Comparative Study

In this work, the properties of ZnO films of 100 nm thickness, grown using atomic layer deposition (ALD) on <i>a</i>–(100) and <i>c</i>–(001) oriented Al<sub>2</sub>O<sub>3</sub> substrate are reported. The films were grown in the same growth condition...

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Bibliographic Details
Main Authors: Sushma Mishra, Wojciech Paszkowicz, Adrian Sulich, Rafal Jakiela, Monika Ożga, Elżbieta Guziewicz
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Materials
Subjects:
ZnO
strain
microstrain
dislocation density
morphology
SIMS
Online Access:https://www.mdpi.com/1996-1944/16/1/151

Internet

https://www.mdpi.com/1996-1944/16/1/151

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