Material Properties of Zr–Cu–Ni–Al Thin Films as Diffusion Barrier Layer

Due to the rapid increase in current density encountered in new chips, the phenomena of thermomigration and electromigration in the solder bump become a serious reliability issue. Currently, Ni or TiN, as a barrier layer, is widely academically studied and industrially accepted to inhibit rapid copp...

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Bibliographic Details
Main Authors: Po-Hsien Sung, Tei-Chen Chen
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/10/6/540