Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology
The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Compre...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-08-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/11/8/443 |