Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology
The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Compre...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-08-01
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| Series: | Chemosensors |
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| Online Access: | https://www.mdpi.com/2227-9040/11/8/443 |
| _version_ | 1797585187809263616 |
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| author | Gennady Gorokh Igor Taratyn Uladzimir Fiadosenka Olga Reutskaya Andrei Lozovenko |
| author_facet | Gennady Gorokh Igor Taratyn Uladzimir Fiadosenka Olga Reutskaya Andrei Lozovenko |
| author_sort | Gennady Gorokh |
| collection | DOAJ |
| description | The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Comprehensive studies of the heater’s current–voltage characteristics have been carried out, heating rates have been measured at various currents, experimental temperature characteristics for various meander topologies have been obtained, heater options have been determined, and optimal heat transfer processes are ensured at a low power consumption of about 20–25 mW. Sensors with an optimal heater topology based on a double dielectric membrane were fabricated according to the described technological process, and sensory responses to 0.5 vol.% CH<sub>4</sub> and 0.2% C<sub>3</sub>H<sub>8</sub> were studied. The obtained results showed good results and confirmed the need to choose the optimal heater topology when designing sensors for recording the given type of gas mixtures in a certain temperature range. |
| first_indexed | 2024-03-11T00:02:27Z |
| format | Article |
| id | doaj.art-85ac6f84097741f191239a477a3aace7 |
| institution | Directory Open Access Journal |
| issn | 2227-9040 |
| language | English |
| last_indexed | 2024-03-11T00:02:27Z |
| publishDate | 2023-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Chemosensors |
| spelling | doaj.art-85ac6f84097741f191239a477a3aace72023-11-19T00:38:33ZengMDPI AGChemosensors2227-90402023-08-0111844310.3390/chemosensors11080443Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon TechnologyGennady Gorokh0Igor Taratyn1Uladzimir Fiadosenka2Olga Reutskaya3Andrei Lozovenko4R&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, BelarusInstrumentation Engineering Faculty, Micro- and Nanotechnology Department, Belarusian National Technical University, 220013 Minsk, BelarusR&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, BelarusInstrumentation Engineering Faculty, Micro- and Nanotechnology Department, Belarusian National Technical University, 220013 Minsk, BelarusR&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, BelarusThe design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Comprehensive studies of the heater’s current–voltage characteristics have been carried out, heating rates have been measured at various currents, experimental temperature characteristics for various meander topologies have been obtained, heater options have been determined, and optimal heat transfer processes are ensured at a low power consumption of about 20–25 mW. Sensors with an optimal heater topology based on a double dielectric membrane were fabricated according to the described technological process, and sensory responses to 0.5 vol.% CH<sub>4</sub> and 0.2% C<sub>3</sub>H<sub>8</sub> were studied. The obtained results showed good results and confirmed the need to choose the optimal heater topology when designing sensors for recording the given type of gas mixtures in a certain temperature range.https://www.mdpi.com/2227-9040/11/8/443chemical sensorcurrent–voltage characteristicsheater topologyMEMS-silicon technologyanodic alumina membrane |
| spellingShingle | Gennady Gorokh Igor Taratyn Uladzimir Fiadosenka Olga Reutskaya Andrei Lozovenko Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology Chemosensors chemical sensor current–voltage characteristics heater topology MEMS-silicon technology anodic alumina membrane |
| title | Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology |
| title_full | Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology |
| title_fullStr | Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology |
| title_full_unstemmed | Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology |
| title_short | Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology |
| title_sort | heater topology influence on the functional characteristics of thin film gas sensors made by mems silicon technology |
| topic | chemical sensor current–voltage characteristics heater topology MEMS-silicon technology anodic alumina membrane |
| url | https://www.mdpi.com/2227-9040/11/8/443 |
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