Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Compre...

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Bibliographic Details
Main Authors:	Gennady Gorokh, Igor Taratyn, Uladzimir Fiadosenka, Olga Reutskaya, Andrei Lozovenko
Format:	Article
Language:	English
Published:	MDPI AG 2023-08-01
Series:	Chemosensors
Subjects:	chemical sensor current–voltage characteristics heater topology MEMS-silicon technology anodic alumina membrane
Online Access:	https://www.mdpi.com/2227-9040/11/8/443

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