Calibrating CGH Substrate TWE and Simulating Adjustment Error in Cylindrical Surface Measurement

Computer-generated hologram (CGH) is a diffractive optical element that has been commonly used as wavefront corrector in the interferometer and can be accurately manufactured to meet the requirements of high-precision detection. But the transmitted wavefront error (TWE) of the CGH substrate and the...

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Bibliographic Details
Main Authors: Linghua Zhang, Sen Han, Xianyu Wu, Xianhao Qi, Jun Cheng, Chunfeng Xu
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9756049/