Calibrating CGH Substrate TWE and Simulating Adjustment Error in Cylindrical Surface Measurement
Computer-generated hologram (CGH) is a diffractive optical element that has been commonly used as wavefront corrector in the interferometer and can be accurately manufactured to meet the requirements of high-precision detection. But the transmitted wavefront error (TWE) of the CGH substrate and the...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2022-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9756049/ |