Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes
Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sen...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-09-01
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Series: | Designs |
Subjects: | |
Online Access: | https://www.mdpi.com/2411-9660/7/5/106 |