Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes
Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sen...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-09-01
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| Series: | Designs |
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| Online Access: | https://www.mdpi.com/2411-9660/7/5/106 |
| _version_ | 1797574146146697216 |
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| author | Waqas Amin Gill Ian Howard Ilyas Mazhar Kristoffer McKee |
| author_facet | Waqas Amin Gill Ian Howard Ilyas Mazhar Kristoffer McKee |
| author_sort | Waqas Amin Gill |
| collection | DOAJ |
| description | Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sensing applications. The design of a MEMS vibrating ring gyroscope incorporates an oscillating ring structure as a proof mass, reflecting unique design challenges and possibilities. This paper presents a comprehensive design analysis of the MEMS vibrating ring gyroscope from the mechanical, electrical, and damping perspectives. The mechanical design of the MEMS vibrating ring gyroscope investigates the various frame designs of the vibrating ring structure, as well as the various beam structures, including rectangular and semicircular beam structures, which are analyzed using mathematical models and finite element analysis (FEA) simulations that provide an in-depth analysis of the stiffness and deflection of the vibrating structures. The electrical designs of the MEMS vibrating ring gyroscope are analyzed using various electrode configurations, electrostatic actuation, and capacitive detection mechanisms. The design analysis of various forms of damping, including viscous, structural, thermoelastic, and anchor damping, is discussed. The variety of design structures is investigated for MEMS vibrating ring gyroscopes’ mechanical, electrical, and damping performance. |
| first_indexed | 2024-03-10T21:19:49Z |
| format | Article |
| id | doaj.art-867cf8389df9454394a4648d737b02a9 |
| institution | Directory Open Access Journal |
| issn | 2411-9660 |
| language | English |
| last_indexed | 2024-03-10T21:19:49Z |
| publishDate | 2023-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Designs |
| spelling | doaj.art-867cf8389df9454394a4648d737b02a92023-11-19T16:11:54ZengMDPI AGDesigns2411-96602023-09-017510610.3390/designs7050106Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator GyroscopesWaqas Amin Gill0Ian Howard1Ilyas Mazhar2Kristoffer McKee3Department of Mechanical Engineering, Curtin University, Perth, WA 6845, AustraliaDepartment of Mechanical Engineering, Curtin University, Perth, WA 6845, AustraliaDepartment of Mechanical Engineering, Curtin University, Perth, WA 6845, AustraliaDepartment of Mechanical Engineering, Curtin University, Perth, WA 6845, AustraliaMicroelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sensing applications. The design of a MEMS vibrating ring gyroscope incorporates an oscillating ring structure as a proof mass, reflecting unique design challenges and possibilities. This paper presents a comprehensive design analysis of the MEMS vibrating ring gyroscope from the mechanical, electrical, and damping perspectives. The mechanical design of the MEMS vibrating ring gyroscope investigates the various frame designs of the vibrating ring structure, as well as the various beam structures, including rectangular and semicircular beam structures, which are analyzed using mathematical models and finite element analysis (FEA) simulations that provide an in-depth analysis of the stiffness and deflection of the vibrating structures. The electrical designs of the MEMS vibrating ring gyroscope are analyzed using various electrode configurations, electrostatic actuation, and capacitive detection mechanisms. The design analysis of various forms of damping, including viscous, structural, thermoelastic, and anchor damping, is discussed. The variety of design structures is investigated for MEMS vibrating ring gyroscopes’ mechanical, electrical, and damping performance.https://www.mdpi.com/2411-9660/7/5/106MEMSMEMS gyroscopevibrating ring gyroscopering resonatorinertial sensorsIMU |
| spellingShingle | Waqas Amin Gill Ian Howard Ilyas Mazhar Kristoffer McKee Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes Designs MEMS MEMS gyroscope vibrating ring gyroscope ring resonator inertial sensors IMU |
| title | Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes |
| title_full | Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes |
| title_fullStr | Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes |
| title_full_unstemmed | Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes |
| title_short | Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes |
| title_sort | design and considerations microelectromechanical system mems vibrating ring resonator gyroscopes |
| topic | MEMS MEMS gyroscope vibrating ring gyroscope ring resonator inertial sensors IMU |
| url | https://www.mdpi.com/2411-9660/7/5/106 |
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