Fabrication of Porous Silicon as a Gas Sensor: The Role of Porous Silicon Surface Morphology
Manufacture of an environmental polluting gas sensor with improved properties by controlling the preparation conditions of the photo-electrochemical etching technique (PECE). The amount of porosity, the diameter of the pores, and the thickness of the prepared layer of porous silicon (Psi) can be con...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Technology, Baghdad
2022-11-01
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| Series: | Journal of Applied Sciences and Nanotechnology |
| Subjects: | |
| Online Access: | https://jasn.uotechnology.edu.iq/article_20385_0d32f8de6fbd55d6a307093b83a274b8.pdf |