Fabrication of capacitive gas sensor applying MoS2 nanoparticles by printing technique
A capacitive MEMS gas sensor is fabricated by transfer printing of Au thin film and inkjet printing of molybdenum disulfide (MoS2) nanoparticles. The transferred Au thin film is formed to be a comb electrode with a width of 100 μm and a thickness of 50 nm, and the comb-like Au electrode surface beco...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2023-12-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/89/928/89_23-00158/_pdf/-char/en |