Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication

Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication

Abstract Silk fibroin (SF) is a natural material with polymorphic structures that determine its water solubility and biodegradability, which can be altered by exposing it to heat. Here, a hybrid thermal lithography method combining scalable microscale laser‐based patterning with nanoscale patterning...

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Bibliographic Details
Main Authors: Mohammadreza Rostami, Aleksandra Marković, Ya Wang, Joffrey Pernollet, Xiaosheng Zhang, Xia Liu, Juergen Brugger
Format: Article
Language:English
Published: Wiley 2024-03-01
Series:Advanced Science
Subjects:
direct write laser (DWL)
dry etching
silk fibroin (SF)
solubility change
thermal scanning probe lithography (t‐SPL)
water development
Online Access:https://doi.org/10.1002/advs.202303518

Internet

https://doi.org/10.1002/advs.202303518

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