Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection
This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-11-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/23/21/8945 |