Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a...

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Bibliographic Details
Main Authors: Francesc Torres, Arantxa Uranga, Núria Barniol
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Sensors
Subjects:
CMOS
humidity sensor
low power
MEMS
monolithic integration
resonators
Online Access:https://www.mdpi.com/1424-8220/23/21/8945

Internet

https://www.mdpi.com/1424-8220/23/21/8945

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