Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection
This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a...
Main Authors: | Francesc Torres, Arantxa Uranga, Núria Barniol |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-11-01
|
Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/23/21/8945 |
Similar Items
-
Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors
by: Francesc Torres, et al.
Published: (2016-10-01) -
Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays
by: Iván Zamora, et al.
Published: (2020-02-01) -
Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process
by: Eyglis Ledesma, et al.
Published: (2021-12-01) -
Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators
by: Rafel Perelló-Roig, et al.
Published: (2018-09-01) -
Concepts and Key Technologies of Microelectromechanical Systems Resonators
by: Tianren Feng, et al.
Published: (2022-12-01)