Defocus Effect Correction for Back Focal Plane Ellipsometry for Antivibration Measurement of Thin Films

Defocus Effect Correction for Back Focal Plane Ellipsometry for Antivibration Measurement of Thin Films

Back focal plane (BFP) ellipsometry, which acquires the ellipsometric parameters of reflected light at different incident and azimuthal angles through a high-<i>NA</i> objective lens, has recently shown great potential in industrial film measurement. In on-line metrology cases for film m...

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Bibliographic Details
Main Authors: Jian Wang, Jun Yang, Lihua Peng, Dawei Tang, Feng Gao, Rong Chen, Liping Zhou
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Applied Sciences
Subjects:
microellipsometry
back focal plane
antivibration measurement
thin film
Online Access:https://www.mdpi.com/2076-3417/13/3/1738

Internet

https://www.mdpi.com/2076-3417/13/3/1738

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