Mechanical and Optical Properties of Cr<sub>2</sub>O<sub>3</sub> Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)<sub>3</sub> and Ozone

Mechanical and Optical Properties of Cr<sub>2</sub>O<sub>3</sub> Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)<sub>3</sub> and Ozone

Cr<sub>2</sub>O<sub>3</sub> thin films were grown on a Si (1 0 0) substrate using Cr(thd)<sub>3</sub> and O<sub>3</sub> by atomic layer deposition (ALD) at substrate temperatures (<i>T<sub>G</sub></i>) from 200 to 300 °C. X-ray...

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Bibliographic Details
Main Authors: Mahtab Salari Mehr, Lauri Aarik, Taivo Jõgiaas, Aarne Kasikov, Elyad Damerchi, Hugo Mändar
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Nanomaterials
Subjects:
chromium oxide
thin films
atomic layer deposition
Ti-doped Cr<sub>2</sub>O<sub>3</sub>
mechanical properties
optical properties
Online Access:https://www.mdpi.com/2079-4991/13/19/2702

Internet

https://www.mdpi.com/2079-4991/13/19/2702

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