Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators
Abstract Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small par...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-12-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-26014-3 |