Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators
Abstract Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small par...
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2022-12-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-26014-3 |
| _version_ | 1811203553452097536 |
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| author | Chun-You Liu Sheng-Shian Li |
| author_facet | Chun-You Liu Sheng-Shian Li |
| author_sort | Chun-You Liu |
| collection | DOAJ |
| description | Abstract Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small particles, generating a large and stable rotation force is critical in micromanipulations. Here, we report a simple and potential angular momentum cell comprising a piezoelectric MEMS-based nonlinear multi-mode resonator with integrated electrodes. A nonlinear rotating nodal line has been observed in specific frequency bands by applying a controllable low voltage of sub 5 V on a 4-port resonator made of lead zirconate titanate (PZT) thin films. The magnitude of the actuated voltage is Complementary-Metal-Oxide-Semiconductor (CMOS)-compatible and easy to integrate with the circuit. Furthermore, the real-time rotation motion of the MEMS-based nonlinear multi-mode resonator is also verified by a laser doppler vibrometer (LDV) at both chirp and single input frequencies, respectively. Therefore, this angular momentum cell shows great potential in the application of micromanipulation. |
| first_indexed | 2024-04-12T02:57:19Z |
| format | Article |
| id | doaj.art-873e349564d4465e9bca235271489ddd |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-04-12T02:57:19Z |
| publishDate | 2022-12-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-873e349564d4465e9bca235271489ddd2022-12-22T03:50:46ZengNature PortfolioScientific Reports2045-23222022-12-0112111010.1038/s41598-022-26014-3Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonatorsChun-You Liu0Sheng-Shian Li1Department of Power Mechanical Engineering, National Tsing Hua UniversityDepartment of Power Mechanical Engineering, National Tsing Hua UniversityAbstract Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small particles, generating a large and stable rotation force is critical in micromanipulations. Here, we report a simple and potential angular momentum cell comprising a piezoelectric MEMS-based nonlinear multi-mode resonator with integrated electrodes. A nonlinear rotating nodal line has been observed in specific frequency bands by applying a controllable low voltage of sub 5 V on a 4-port resonator made of lead zirconate titanate (PZT) thin films. The magnitude of the actuated voltage is Complementary-Metal-Oxide-Semiconductor (CMOS)-compatible and easy to integrate with the circuit. Furthermore, the real-time rotation motion of the MEMS-based nonlinear multi-mode resonator is also verified by a laser doppler vibrometer (LDV) at both chirp and single input frequencies, respectively. Therefore, this angular momentum cell shows great potential in the application of micromanipulation.https://doi.org/10.1038/s41598-022-26014-3 |
| spellingShingle | Chun-You Liu Sheng-Shian Li Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators Scientific Reports |
| title | Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators |
| title_full | Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators |
| title_fullStr | Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators |
| title_full_unstemmed | Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators |
| title_short | Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators |
| title_sort | experimental investigation of rotating nodal line of mems based nonlinear multi mode resonators |
| url | https://doi.org/10.1038/s41598-022-26014-3 |
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