Influence of Process Parameters on Properties of Non-Reactive RF Magnetron-Sputtered Indium Tin Oxide Thin Films Used as Electrodes for Organic Light-Emitting Diodes

Influence of Process Parameters on Properties of Non-Reactive RF Magnetron-Sputtered Indium Tin Oxide Thin Films Used as Electrodes for Organic Light-Emitting Diodes

Indium tin oxide (ITO) is a transparent conductive oxide (TCO) commonly used in the realization of optoelectronic devices needing at least a transparent electrode. In this work, ITO thin films were deposited on glass substrates by non-reactive RF magnetron sputtering, investigating the effects of po...

Full description

Bibliographic Details
Main Authors: Claudia Diletto, Fiorita Nunziata, Salvatore Aprano, Ludovico Migliaccio, Maria Grazia Maglione, Alfredo Rubino, Paolo Tassini
Format: Article
Language:English
Published: MDPI AG 2024-08-01
Series:Crystals
Subjects:
indium tin oxide
ITO film
RF sputtering
OLED electrode
Online Access:https://www.mdpi.com/2073-4352/14/9/776

Internet

https://www.mdpi.com/2073-4352/14/9/776

Similar Items