Structural, Morphological and Optical Analysis of TiO2 Thin Films Prepared by RF Magnetron Sputtering
Thin layer of titanium dioxide has been deposited on a glass sheet using RF magnetron sputtering under different preparation conditions. Phase, lattice parameters, optical features and morphology were investigated under different laboratory conditions in different thicknesses by using XRD, spectroph...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Islamic Azad University, Marvdasht Branch
2021-10-01
|
Series: | Journal of Optoelectronical Nanostructures |
Subjects: | |
Online Access: | https://jopn.marvdasht.iau.ir/article_5041_ab9d7f79dec58af82a04e2041a79dd9e.pdf |