Nanoribbon‐Based Flexible High‐Performance Transistors Fabricated at Room Temperature
Abstract Si‐nanoribbon‐based high‐performance field‐effect transistors (FETs) with room temperature (RT)‐deposited dielectric are presented. The distinct feature of these devices is that the high‐quality SiNx dielectric deposition at RT, directly on the transfer‐printed nanoribbons, is compatible wi...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2020-04-01
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Series: | Advanced Electronic Materials |
Subjects: | |
Online Access: | https://doi.org/10.1002/aelm.201901023 |