Exploiting the properties of TiO2 thin films as a sensing layer on (MEMS)-based sensors for radiation dosimetry applications
In this work, we investigate the potential of exploiting TiO2 thin films as sensing layers on silicon micro-electromechanical systems for the detection of gamma radiations. All samples are exposed to gamma rays produced by 60Co, with different doses ranging from 0 kGy to 40 kGy. Properties of silico...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0032353 |