Reduced-Order Modeling of Parametrically Excited Micro-Electro-Mechanical Systems (MEMS)
Reduced-order modeling is a systematic way of constructing models with smaller number of states that can capture the “essential dynamics” of the large-scale systems, accurately. In this paper, reduced-order modeling and control techniques for parametrically excited MEMS are presented. The techniques...
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| Format: | Article |
| Language: | English |
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SAGE Publishing
2010-01-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1155/2010/632831 |