Main properties of silicides of the Mo - Si system
Using magnetron-ion sputtering, a layer of metallic molybdenum 1–2 μm thick was deposited on the surface of a silicon single crystal grown by the Czochralski method in an atmosphere of an inert argon gas at ambient temperature. According to the results of the experiment, pure Mo layers 2 μm thick de...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2023/99/e3sconf_afe23_03012.pdf |