HNF - Helmholtz Nano Facility
The Helmholtz Nano Facility (HNF) is a state-of-the-art cleanroom facility. The cleanroom has ~1100 m2 with cleanroom classes of DIN ISO 1-3. HNF operates according to VDI DIN 2083, Good Manufacturing Practice (GMP) and aquivalent to Semiconductor Industry Association (SIA) standards. HNF is a user...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Forschungszentrum Jülich
2017-05-01
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| Series: | Journal of large-scale research facilities JLSRF |
| Online Access: | https://jlsrf.org/index.php/lsf/article/view/158 |