Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form...

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Bibliographic Details
Main Authors: Romain Pommois, Gaku Furusawa, Takuya Kosuge, Shun Yasunaga, Haruki Hanawa, Hidetoshi Takahashi, Tetsuo Kan, Hisayuki Aoyama
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Micromachines
Subjects:
microelectromechanical system (MEMS) cantilever-type force sensor
temperature compensation
microflow measurement
Online Access:https://www.mdpi.com/2072-666X/11/7/647

Internet

https://www.mdpi.com/2072-666X/11/7/647

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