Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever
In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-06-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/7/647 |
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| author | Romain Pommois Gaku Furusawa Takuya Kosuge Shun Yasunaga Haruki Hanawa Hidetoshi Takahashi Tetsuo Kan Hisayuki Aoyama |
| author_facet | Romain Pommois Gaku Furusawa Takuya Kosuge Shun Yasunaga Haruki Hanawa Hidetoshi Takahashi Tetsuo Kan Hisayuki Aoyama |
| author_sort | Romain Pommois |
| collection | DOAJ |
| description | In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations. |
| first_indexed | 2024-03-10T18:47:36Z |
| format | Article |
| id | doaj.art-8873877f54f0493a9431f8f04e1717ed |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T18:47:36Z |
| publishDate | 2020-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-8873877f54f0493a9431f8f04e1717ed2023-11-20T05:23:11ZengMDPI AGMicromachines2072-666X2020-06-0111764710.3390/mi11070647Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive CantileverRomain Pommois0Gaku Furusawa1Takuya Kosuge2Shun Yasunaga3Haruki Hanawa4Hidetoshi Takahashi5Tetsuo Kan6Hisayuki Aoyama7École Nationale Supérieure de Mécanique et des Microtechniques, 26 Rue de l’Épitaphe, 25000 Besançon, FranceDepartment of Mechanical and Intelligent Systems Engineering, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-city, Tokyo 182-8585, JapanDepartment of Mechanical and Intelligent Systems Engineering, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-city, Tokyo 182-8585, JapanDepartment of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JapanDepartment of Mechanical and Intelligent Systems Engineering, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-city, Tokyo 182-8585, JapanDepartment of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama, Kanagawa 223-8522, JapanDepartment of Mechanical and Intelligent Systems Engineering, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-city, Tokyo 182-8585, JapanDepartment of Mechanical and Intelligent Systems Engineering, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-city, Tokyo 182-8585, JapanIn this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.https://www.mdpi.com/2072-666X/11/7/647microelectromechanical system (MEMS) cantilever-type force sensortemperature compensationmicroflow measurement |
| spellingShingle | Romain Pommois Gaku Furusawa Takuya Kosuge Shun Yasunaga Haruki Hanawa Hidetoshi Takahashi Tetsuo Kan Hisayuki Aoyama Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever Micromachines microelectromechanical system (MEMS) cantilever-type force sensor temperature compensation microflow measurement |
| title | Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever |
| title_full | Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever |
| title_fullStr | Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever |
| title_full_unstemmed | Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever |
| title_short | Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever |
| title_sort | micro water flow measurement using a temperature compensated mems piezoresistive cantilever |
| topic | microelectromechanical system (MEMS) cantilever-type force sensor temperature compensation microflow measurement |
| url | https://www.mdpi.com/2072-666X/11/7/647 |
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