Can ZrAlN thin films be used as thermistor sensors for temperature assessment?
The electrical characteristics and conduction mechanisms of ZrAlN thin films for their potential use as thermistor sensors were assessed. Various compositions of Zr1-xAlxN were synthesized by sputtering and studied up to 200 °C to understand their sensitivity and applicability. Among the composition...
| 主要な著者: | , , , , , |
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| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
Elsevier
2024-06-01
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| シリーズ: | Journal of Science: Advanced Materials and Devices |
| 主題: | |
| オンライン･アクセス: | http://www.sciencedirect.com/science/article/pii/S2468217924000078 |