Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation
This paper presents a simulation and characterization of piezoelectric macromachined ultrasonic transducer (PMUT) based on planar electrodes. This small scale device with low power consumption is important as an underwater sensor. However, PMUT has a low sensitivity problem. Thus, PMUT based on plan...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
ARQII PUBLICATION
2020-09-01
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| Series: | Applications of Modelling and Simulation |
| Subjects: | |
| Online Access: | http://arqiipubl.com/ojs/index.php/AMS_Journal/article/view/194/106 |