Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation
This paper presents a simulation and characterization of piezoelectric macromachined ultrasonic transducer (PMUT) based on planar electrodes. This small scale device with low power consumption is important as an underwater sensor. However, PMUT has a low sensitivity problem. Thus, PMUT based on plan...
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| Format: | Article |
| Language: | English |
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ARQII PUBLICATION
2020-09-01
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| Series: | Applications of Modelling and Simulation |
| Subjects: | |
| Online Access: | http://arqiipubl.com/ojs/index.php/AMS_Journal/article/view/194/106 |
| _version_ | 1818133449348743168 |
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| author | Khairul Azman Ahmad Mohamad Faizal Abd Rahman Noramalina Abdullah |
| author_facet | Khairul Azman Ahmad Mohamad Faizal Abd Rahman Noramalina Abdullah |
| author_sort | Khairul Azman Ahmad |
| collection | DOAJ |
| description | This paper presents a simulation and characterization of piezoelectric macromachined ultrasonic transducer (PMUT) based on planar electrodes. This small scale device with low power consumption is important as an underwater sensor. However, PMUT has a low sensitivity problem. Thus, PMUT based on planar electrodes are designed to improve the sensitivity of the PMUT. The designs are simulated using Finite Element Analysis (FEA) COMSOL Multiphysics 5.0. It is based on planar electrodes, cavity and multilayer membranes which can improve the transmitting and receiving sensitivity of ultrasonic transducer. The targeting application is for an underwater sensor with the range frequency in between 300 kHz to 800 kHz. Two characterizations are studied which are transmitting voltage response (TVR) and open circuit receiving response (OCRR). Three parameters are investigated namely the piezoelectric material, the thickness of PZT5H and electrode area. In simulation results, aluminium nitrate (AlN) has the highest in both TVR and OCRR. For the different PZT5H thicknesses, the highest transmitting sensitivity is obtained at the thickness of 300 μm meanwhile for highest receiving sensitivity is obtained at the thickness of 500 μm. It is found that the electrode area at 0.3 mm x 0.3 mm has the highest in both transmitting sensitivity and receiving sensitivity. Based on the targeted frequency design, PZT5H with a thickness of 200 μm and the electrode area of 0.5 mm x 0.5 mm is the most appropriate one. |
| first_indexed | 2024-12-11T08:52:54Z |
| format | Article |
| id | doaj.art-88b05383f5b547c8b4029f1398d2b93f |
| institution | Directory Open Access Journal |
| issn | 2600-8084 |
| language | English |
| last_indexed | 2024-12-11T08:52:54Z |
| publishDate | 2020-09-01 |
| publisher | ARQII PUBLICATION |
| record_format | Article |
| series | Applications of Modelling and Simulation |
| spelling | doaj.art-88b05383f5b547c8b4029f1398d2b93f2022-12-22T01:13:58ZengARQII PUBLICATIONApplications of Modelling and Simulation2600-80842020-09-014297304Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA SimulationKhairul Azman Ahmad0Mohamad Faizal Abd Rahman1Noramalina Abdullah2Faculty of Electrical Engineering, Universiti Teknologi MARA, Cawangan Pulau Pinang, 13500 Permatang Pauh, Pulau Pinang, MalaysiaFaculty of Electrical Engineering, Universiti Teknologi MARA, Cawangan Pulau Pinang, 13500 Permatang Pauh, Pulau Pinang, MalaysiaSchool of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Pulau Pinang, MalaysiaThis paper presents a simulation and characterization of piezoelectric macromachined ultrasonic transducer (PMUT) based on planar electrodes. This small scale device with low power consumption is important as an underwater sensor. However, PMUT has a low sensitivity problem. Thus, PMUT based on planar electrodes are designed to improve the sensitivity of the PMUT. The designs are simulated using Finite Element Analysis (FEA) COMSOL Multiphysics 5.0. It is based on planar electrodes, cavity and multilayer membranes which can improve the transmitting and receiving sensitivity of ultrasonic transducer. The targeting application is for an underwater sensor with the range frequency in between 300 kHz to 800 kHz. Two characterizations are studied which are transmitting voltage response (TVR) and open circuit receiving response (OCRR). Three parameters are investigated namely the piezoelectric material, the thickness of PZT5H and electrode area. In simulation results, aluminium nitrate (AlN) has the highest in both TVR and OCRR. For the different PZT5H thicknesses, the highest transmitting sensitivity is obtained at the thickness of 300 μm meanwhile for highest receiving sensitivity is obtained at the thickness of 500 μm. It is found that the electrode area at 0.3 mm x 0.3 mm has the highest in both transmitting sensitivity and receiving sensitivity. Based on the targeted frequency design, PZT5H with a thickness of 200 μm and the electrode area of 0.5 mm x 0.5 mm is the most appropriate one.http://arqiipubl.com/ojs/index.php/AMS_Journal/article/view/194/106finite elementopen circuit receiving responseplanar based electrode pmuttransmitting voltage responseunderwater sensor |
| spellingShingle | Khairul Azman Ahmad Mohamad Faizal Abd Rahman Noramalina Abdullah Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation Applications of Modelling and Simulation finite element open circuit receiving response planar based electrode pmut transmitting voltage response underwater sensor |
| title | Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation |
| title_full | Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation |
| title_fullStr | Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation |
| title_full_unstemmed | Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation |
| title_short | Characterization of Planar Based Electrode Piezoelectric Micromachined Ultrasonic Transducer for Underwater Sensor Application using FEA Simulation |
| title_sort | characterization of planar based electrode piezoelectric micromachined ultrasonic transducer for underwater sensor application using fea simulation |
| topic | finite element open circuit receiving response planar based electrode pmut transmitting voltage response underwater sensor |
| url | http://arqiipubl.com/ojs/index.php/AMS_Journal/article/view/194/106 |
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