A TSV-Structured Room Temperature p-Type TiO<sub>2</sub> Nitric Oxide Gas Sensor
Planar MOS/MEMS gas sensors have been widely studied and applied, but the detection of exhaled gas has been little developed. The flow rate of exhaled gas affects the suspension structure of the MEMS gas sensor and the operating temperature of the gas sensor. Therefore, this study uses the Bosch pro...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-10-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/19/9946 |