Error Model and Frequency Modulation Characteristics Analysis of Laser Processing Platform for Micro Crystal Resonator
Laser processing platform for micro crystal resonator (MCR) frequency modulation is an important piece of equipment to apply laser etching technology to the MCR frequency modulation process. The positioning accuracy of the laser processing platform has an important influence on frequency modulation...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-01-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/3/1340 |