A Wireless Pressure Microsensor Fabricated in HTCC Technology for Dynamic Pressure Monitoring in Harsh Environments
The partially stabilized zirconia (PSZ) ceramic has wide applications due to its excellent mechanical toughness and chemically inert and electrical properties for fabricating various devices. In this paper, a novel high temperature pressure sensor with the PSZ was designed and fabricated. The sensor...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi - SAGE Publishing
2015-01-01
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| Series: | International Journal of Distributed Sensor Networks |
| Online Access: | https://doi.org/10.1155/2015/974742 |