Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid

The effect of an insulation lid on the growth of 4-inch β-Ga<sub>2</sub>O<sub>3</sub> single crystals by the Czochralski method is analyzed by numerical simulation. The insulation lid mainly hinders upward radiant heat transfer from the melt and crucible and increases the axi...

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Main Authors: Dan Wu, Ning Xia, Keke Ma, Jiabin Wang, Cheng Li, Zhu Jin, Hui Zhang, Deren Yang
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/12/12/1715
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author Dan Wu
Ning Xia
Keke Ma
Jiabin Wang
Cheng Li
Zhu Jin
Hui Zhang
Deren Yang
author_facet Dan Wu
Ning Xia
Keke Ma
Jiabin Wang
Cheng Li
Zhu Jin
Hui Zhang
Deren Yang
author_sort Dan Wu
collection DOAJ
description The effect of an insulation lid on the growth of 4-inch β-Ga<sub>2</sub>O<sub>3</sub> single crystals by the Czochralski method is analyzed by numerical simulation. The insulation lid mainly hinders upward radiant heat transfer from the melt and crucible and increases the axial temperature gradient in the crystal. Such benefits make the melt/crystal interface convex, which is conducive to suppressing spiral growth and growing large crystals with high quality. Materials with low thermal conductivity <i>λ</i> and low emissivity <i>ε</i> are the optimal choices for making an insulation lid. The inner hole has a great influence on the isolation of radiant heat, and it is determined that the maximum size of the inner diameter <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msub><mi>D</mi><mrow><mi>i</mi><mi>n</mi></mrow></msub></mrow></semantics></math></inline-formula> should not be larger than 130 mm. Thermal stress analysis results indicated that the insulation lid will cause a better stress distribution, illustrating the effect of the insulation lid on the quality of a cylindrical crystal.
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spelling doaj.art-891732e379a642dbbbd020a192a52c2a2023-11-24T14:09:43ZengMDPI AGCrystals2073-43522022-11-011212171510.3390/cryst12121715Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation LidDan Wu0Ning Xia1Keke Ma2Jiabin Wang3Cheng Li4Zhu Jin5Hui Zhang6Deren Yang7State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, ChinaZhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, ChinaZhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, ChinaZhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, ChinaState Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, ChinaState Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, ChinaState Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, ChinaState Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, ChinaThe effect of an insulation lid on the growth of 4-inch β-Ga<sub>2</sub>O<sub>3</sub> single crystals by the Czochralski method is analyzed by numerical simulation. The insulation lid mainly hinders upward radiant heat transfer from the melt and crucible and increases the axial temperature gradient in the crystal. Such benefits make the melt/crystal interface convex, which is conducive to suppressing spiral growth and growing large crystals with high quality. Materials with low thermal conductivity <i>λ</i> and low emissivity <i>ε</i> are the optimal choices for making an insulation lid. The inner hole has a great influence on the isolation of radiant heat, and it is determined that the maximum size of the inner diameter <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msub><mi>D</mi><mrow><mi>i</mi><mi>n</mi></mrow></msub></mrow></semantics></math></inline-formula> should not be larger than 130 mm. Thermal stress analysis results indicated that the insulation lid will cause a better stress distribution, illustrating the effect of the insulation lid on the quality of a cylindrical crystal.https://www.mdpi.com/2073-4352/12/12/1715β-Ga<sub>2</sub>O<sub>3</sub>insulation lidnumerical simulationCzochralski methodmelt/crystal interface
spellingShingle Dan Wu
Ning Xia
Keke Ma
Jiabin Wang
Cheng Li
Zhu Jin
Hui Zhang
Deren Yang
Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid
Crystals
β-Ga<sub>2</sub>O<sub>3</sub>
insulation lid
numerical simulation
Czochralski method
melt/crystal interface
title Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid
title_full Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid
title_fullStr Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid
title_full_unstemmed Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid
title_short Numerical Simulation of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystal Growth by Czochralski Method with an Insulation Lid
title_sort numerical simulation of β ga sub 2 sub o sub 3 sub single crystal growth by czochralski method with an insulation lid
topic β-Ga<sub>2</sub>O<sub>3</sub>
insulation lid
numerical simulation
Czochralski method
melt/crystal interface
url https://www.mdpi.com/2073-4352/12/12/1715
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