Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensi...

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Bibliographic Details
Main Authors: John-Ojur Dennis, Abdelaziz-Yousif Ahmed, Mohd-Haris Khir
Format: Article
Language:English
Published: MDPI AG 2015-07-01
Series:Sensors
Subjects:
CMOS-MEMS humidity sensor
titanium dioxide nanoparticles
post-CMOS micromachining
sensor response
recovery and repeatability
Online Access:http://www.mdpi.com/1424-8220/15/7/16674

Internet

http://www.mdpi.com/1424-8220/15/7/16674

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