An Electrostatic Self-Excited Resonator with Pre-Tension/Pre-Compression Constraint for Active Rotation Control

We report a novel electrostatic self-excited resonator driven by DC voltage that achieves variable velocity-position characteristics via applying the pre-tension/pre-compression constraint. The resonator consists of a simply supported micro-beam, two plate electrodes, and two adjustable constraint b...

Full description

Bibliographic Details
Main Authors: Ruide Yun, Yangsheng Zhu, Zhiwei Liu, Jianmei Huang, Xiaojun Yan, Mingjing Qi
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/6/650