An Electrostatic Self-Excited Resonator with Pre-Tension/Pre-Compression Constraint for Active Rotation Control
We report a novel electrostatic self-excited resonator driven by DC voltage that achieves variable velocity-position characteristics via applying the pre-tension/pre-compression constraint. The resonator consists of a simply supported micro-beam, two plate electrodes, and two adjustable constraint b...
Main Authors: | Ruide Yun, Yangsheng Zhu, Zhiwei Liu, Jianmei Huang, Xiaojun Yan, Mingjing Qi |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-06-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/6/650 |
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